Industries
Semiconductors
In process and characterisation tools, reliable transfer depends on cleanliness, geometry, orientation, travel, repeatability and chamber compatibility. The system is defined from the sample and full sequence, not from an isolated actuator.
The system before the part number
In process and characterisation tools, reliable transfer depends on cleanliness, geometry, orientation, travel, repeatability and chamber compatibility. The system is defined from the sample and full sequence, not from an isolated actuator.
Inputs that drive selection
- Wafer or sample format, carrier and orientation
- Sequence across load lock, transfer, process and analysis
- Vacuum level, allowable contamination and materials
- Automation, sensors, interlocks and maintenance
Recommendation boundary
VPD relates technologies, components and interfaces from documented requirements. The final configuration, performance and acceptance plan are confirmed for each installation.
Bricada
UHV transfer for samples and wafers
We highlight Bricada’s authorised range of transfer arms, magnetic manipulators and load-lock systems. Travel, carrier, interface and automation are validated for each tool.
VPD
Key technologies for this sector
Open each route to review selection criteria, subsystems and related manufacturers.
Thin-film deposition
Solutions for evaporation, sputtering, PLD and research or process coating.
View technology →Vacuum motion
Linear, rotary and multi-axis motion without compromising leak tightness or cleanliness.
View technology →XPS and surface spectroscopy
Components and integration to prepare, position and analyse samples in UHV with repeatable geometry.
View technology →Cannot find the exact part or configuration?
Send us the part number and operating conditions; we will review manufacturers, compatibility and alternatives.